Greene, Tweed’s Voraz™ 511, a perflfl uoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber effifi ciency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed’s proprietary (patent pending) Extensis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of material properties and design capability makes Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment.
FEATURES & BENEFITS
• Good plasma resistance minimizes contamination and helps reduce total cost of tool ownership
• Low stiction for easier installation and maintenance
• Large, custom seal designs (made using Extensis process) tailored to FPD and solar processing equipment
APPLICATIONS
• Slit valve doors
• Process chamber lids
• Shower heads
• Gas inlets/outlets
| Original Document | Technical Datasheet(English) | |||
| Features | Plasma resistance | |||
| Appearance | Gray Color | |||
| Physical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
|---|---|---|---|
Density/Specific Gravity | *** g/cm³ | ASTM D297 | |
| Mechanical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Tensile Strength | |||
- | *** Mpa | ASTM D1414 | |
at 50% strain | *** Mpa | ASTM D1414 | |
at 100% strain | *** Mpa | ASTM D1414 | |
Tensile Elongation | |||
Break | *** % | ASTM D1414 | |
Compression Set | *** % | ASTM D 395 | 204°C, 70 hours |
| Hardness | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Shore A hardness | *** A | ASTM D 2240 | |
| Thermal | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Continuous Use Temperature | |||
Long term | *** °C | Internal |
The information presented on this datasheet was acquired by AjiEng.com from the producer of the material. AjiEng.com makes substantial efforts to assure the accuracy of this data. However, AjiEng.com assumes no responsibility for the data values and strongly encourages that upon final material selection, data points are validated with the material supplier.
