Specifically developed to meet the demands of aggressive dry O2 based plasma etch systems, Chemraz® 667’s unique formulation provides enhanced resistance to cracking and improved physical properties. This softer, lower stiction perfluoroelastomer makes seal installation easier and increases seal lifetime, resulting in greater equipment uptime and higher wafer processing yields.
Recommended for both static and semi-dynamic oxide etch waferprocessing applications, Chemraz 667 remains stable at continuous service temperatures up to 300ºC (572°F).
FEATURES & BENEFITS
• Excellent O2 based plasma resistance
• Lower hardness facilitates seal installation
• Lower compression set extends service lifetime
• Lower sticking force reduces tearing with semi-dynamic seal applications
• Unique formulation withstands high service temperatures up to 300ºC (572°F)
APPLICATIONS
• Chamber seals • KF fitting seals • Endpoint windows • Lid seals • Gas inlet seals • Slit valve seals • Gate valve seals • Window seals • Isolator valve seals
| Original Document | Technical Datasheet(English) | |||
| Features | Heat ResistancePlasma resistanceChemical Resistance | |||
| Appearance | Purpel/Burgundy | |||
| Physical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
|---|---|---|---|
Density/Specific Gravity | *** g/cm³ | ASTM D792 | |
| Mechanical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Tensile Strength | |||
- | *** Mpa | ASTM D1414 | |
at 50% strain | *** Mpa | ASTM D1414 | |
at 100% strain | *** Mpa | ASTM D1414 | |
Tensile Elongation | |||
- | *** % | ASTM D1414 | |
Compression Set | *** % | ASTM D 395 | 200°C, 70 hr, 25% Deflection |
| Hardness | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Rockwell M | *** M | ASTM D 785 | |
Shore A hardness | *** A | ASTM D 2240 | |
| Thermal | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Continuous Use Temperature | |||
Long term | ***~*** °C | Internal |
The information presented on this datasheet was acquired by AjiEng.com from the producer of the material. AjiEng.com makes substantial efforts to assure the accuracy of this data. However, AjiEng.com assumes no responsibility for the data values and strongly encourages that upon final material selection, data points are validated with the material supplier.
