Chemraz® 520 is recommended for a wide variety of semiconductor equipment dry processing applications where seal reliability with minimal contamination is required. Chemraz® 520 offers excellent performance in static and dynamic plasma and diffusion processes as well as static photolithography processes. Chemraz® 520 is formulated for use in high sealing load applications and where temperatures do not exceed 464°F (240°C). Due to the hardness of this material, low-temperature applications may require smoother hardware surface finishes of 10 microinches (Ra) and below.
Features and Benefits
• Excellent plasma resistance
• Outstanding physical properties
• Low contaminants
• Withstands higher sealing loads
• Excellent performance history in higher temperature applications
Applications
• Door seals
• Slit valves
• Isolator valve seals
• Lid seals
• Gas inlet seals
• KF fitting seals
| Original Document | Technical Datasheet(English) | |||
| Appearance | White | |||
| Physical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
|---|---|---|---|
Density/Specific Gravity | *** g/cm³ | ASTM D297 | |
| Mechanical | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Tensile Strength | |||
- | *** Mpa | ASTM D1414 | |
at 50% strain | *** Mpa | ASTM D1414 | |
at 100% strain | *** Mpa | ASTM D1414 | |
Tensile Elongation | |||
- | *** % | ASTM D1414 | |
Compression Set | *** % | ASTM D 395 | 204°C, 70 hr, 25% Deflection |
| Hardness | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Shore A hardness | *** A | ASTM D 2240 | |
| Thermal | Value/Unit(Sign in to View) | Test Standard | Test Condition |
Continuous Use Temperature | |||
Long term | ***~*** °C | Internal |
The information presented on this datasheet was acquired by AjiEng.com from the producer of the material. AjiEng.com makes substantial efforts to assure the accuracy of this data. However, AjiEng.com assumes no responsibility for the data values and strongly encourages that upon final material selection, data points are validated with the material supplier.
